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Wyświetlanie 1-2 z 2
Tytuł:
ARMScope – the versatile platform for scanning probe microscopy systems
Autorzy:
Świadkowski, Bartosz
Piasecki, Tomasz
Rudek, Maciej
Świątkowski, Michał
Gajewski, Krzysztof
Majstrzyk, Wojciech
Babij, Michał
Dzierka, Andrzej
Gotszalk, Teodor
Powiązania:
https://bibliotekanauki.pl/articles/221551.pdf
Data publikacji:
2020
Wydawca:
Polska Akademia Nauk. Czytelnia Czasopism PAN
Tematy:
Scanning probe microscopy
AFM
Kelvin Probe force microscopy
scanning tunnelling microscopy
Opis:
Scanning probe microscopy (SPM) since its invention in the 80’s became very popular in examination of many different sample parameters, both in university and industry. This was the effect of bringing this technology closer to the operator. Although the ease of use opened a possibility for measurements without high labour requirement, a quantitative analysis is still a limitation in Scanning Probe Microscopes available on the market. Based on experience of Nano-metrology Group, SPM still can be considered as a tool for quantitative examination of thermal, electrical and mechanical surface parameters. In this work we present an ARMScope platform as a versatile SPM controller that is proved to be useful in a variety of applications: from atomic-resolution STM (Scanning Tunnelling Microscopy) to Multi-resonance KPFM (Kelvin Probe force microscopy) to commercial SEMs (Scanning electron microscopes).
Źródło:
Metrology and Measurement Systems; 2020, 27, 1; 119-130
0860-8229
Pojawia się w:
Metrology and Measurement Systems
Dostawca treści:
Biblioteka Nauki
Artykuł
Tytuł:
A method of magnetic field measurement in a scanning electron microscope using a microcantilever magnetometer
Autorzy:
Orłowska, Karolina
Mognaschi, Maria E.
Kwoka, Krzysztof
Piasecki, Tomasz
Kunicki, Piotr
Sierakowski, Andrzej
Majstrzyk, Wojciech
Podgórni, Arkadiusz
Pruchnik, Bartosz
di Barba, Paolo
Gotszalk, Teodor
Powiązania:
https://bibliotekanauki.pl/articles/220725.pdf
Data publikacji:
2020
Wydawca:
Polska Akademia Nauk. Czytelnia Czasopism PAN
Tematy:
scanning electron microscope
magnetometry
microcantilever
Opis:
Scanning electron microscopy (SEM) is a perfect technique for micro-/nano-object imaging [1] and movement measurement [2, 3] both in high and environmental vacuum conditions and at various temperatures ranging from elevated to low temperatures. In our view, the magnetic field expanding from the pole-piece makes it possible to characterize the behaviour of electromagnetic micro- and nano-electromechanical systems (MEMS/NEMS) in which the deflection of the movable part is controlled by the electromagnetic force. What must be determined, however, is the magnetic field expanding from the e-beam column, which is a function of many factors, like working distance (WD), magnification and position of the device in relation to the e-beam column. There are only a few experimental methods for determination of the magnetic field in a scanning electron microscope. In this paper we present a method of the magnetic field determination under the scanning electron column by application of a silicon cantilever magnetometer. The micro-cantilever magnetometer is a silicon micro-fabricated MEMS electromagnetic device integrating a current loop of lithographically defined dimensions. Its stiffness can be calibrated with a precision of 5% by the method described by Majstrzyk et al. [4]. The deflection of the magnetometer cantilever is measured with a scanning electron microscope and thus, through knowing the bias current, it is possible to determine the magnetic field generated by the e-beam column in a defined position and at a defined magnification.
Źródło:
Metrology and Measurement Systems; 2020, 27, 1; 141-149
0860-8229
Pojawia się w:
Metrology and Measurement Systems
Dostawca treści:
Biblioteka Nauki
Artykuł
    Wyświetlanie 1-2 z 2

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