- Tytuł:
- Applications of the LTCC ceramics in microplasma systems
- Autorzy:
-
Macioszczyk, Jan
Golonka, Leszek - Powiązania:
- https://bibliotekanauki.pl/articles/220499.pdf
- Data publikacji:
- 2019
- Wydawca:
- Polska Akademia Nauk. Czytelnia Czasopism PAN
- Tematy:
-
microplasma
Low-Temperature Co-fired Ceramics
microsystems - Opis:
- In this paper the current status of microplasma devices and systems made in the LTCC technology is presented. The microplasma characteristics and applications are described. We discuss the properties of the LTCC materials, that are necessary for reliable operation of the sources. This material is well known for its good reliability and durability in harsh conditions. Still, only a few examples of such microplasma sources are described. Some of them have been developed by the authors and successfully used for chemical analysis and synthesis.
- Źródło:
-
Metrology and Measurement Systems; 2019, 26, 4; 713-724
0860-8229 - Pojawia się w:
- Metrology and Measurement Systems
- Dostawca treści:
- Biblioteka Nauki
Artykuł