- Tytuł:
- MEMS accelerometer simulations in Matlab/SIMULINK and COMSOL Multiphysics
- Autorzy:
- Nazdrowicz, J.
- Powiązania:
- https://bibliotekanauki.pl/articles/397778.pdf
- Data publikacji:
- 2017
- Wydawca:
- Politechnika Łódzka. Wydział Mikroelektroniki i Informatyki
- Tematy:
-
microelectromechanical systems
simulation model
microaccelerometer
MATLAB
SIMULINK
MEMS modeling
SimScape toolbox
mikroukład elektromechaniczny
model symulacyjny
mikroakcelerometr
modelowanie MEMS
SimScape - Opis:
- In this paper modelling and simulation of MEMS accelerometers in Matlab/SIMULINK environment are presented. Results of simulations of three different approaches: mathematical, electrical equivalent and physical models are compared with FEM accelerometer model created in COMSOL software. Results of simulations are analyzed for displacement response for two of the most popular spring geometries - folded and straight. Author takes into consideration crucial aspects of damping coefficients influence on accelerometer performance.
- Źródło:
-
International Journal of Microelectronics and Computer Science; 2017, 8, 4; 161-167
2080-8755
2353-9607 - Pojawia się w:
- International Journal of Microelectronics and Computer Science
- Dostawca treści:
- Biblioteka Nauki