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    Wyświetlanie 1-5 z 5
    Tytuł:
    Characterization of the ionization process inside a miniature glow-discharge micropump
    Autorzy:
    Grzebyk, T.
    Górecka-Drzazga, A.
    Powiązania:
    https://bibliotekanauki.pl/articles/200204.pdf
    Data publikacji:
    2018
    Wydawca:
    Polska Akademia Nauk. Czytelnia Czasopism PAN
    Tematy:
    ion-sorption micropump
    MEMS-type micropump
    gas discharge
    ionization
    mikropompa jonowo-sorpcyjna
    mikropompa typu MEMS
    wyładowanie gazu
    jonizacja
    Opis:
    The article presents a detailed characterization of the ionization process taking place inside a miniature MEMS-type ion-sorption vacuum pump, based on the Penning pump architecture. Influence of a variety of parameters on the discharge current has been investigated. These include: magnetic field, type of material used for the electrodes as well as horizontal and vertical dimensions of the micropump. It was found that the micropump works efficiently as long as the magnetic field is higher than 0.3 T, and the pumping cell’s dimensions exceed 1x1x1 mm3. Best results have been obtained for copper and aluminum cathodes and low resistivity silicon anodes.
    Źródło:
    Bulletin of the Polish Academy of Sciences. Technical Sciences; 2018, 66, 2; 173-178
    0239-7528
    Pojawia się w:
    Bulletin of the Polish Academy of Sciences. Technical Sciences
    Dostawca treści:
    Biblioteka Nauki
    Artykuł
    Tytuł:
    Vacuum microdevices
    Autorzy:
    Grzebyk, T.
    Górecka-Drzazga, A.
    Powiązania:
    https://bibliotekanauki.pl/articles/201008.pdf
    Data publikacji:
    2012
    Wydawca:
    Polska Akademia Nauk. Czytelnia Czasopism PAN
    Tematy:
    vacuum microsystems
    miniature vacuum pump
    field-emission electron source
    MEMS
    Opis:
    In the paper MEMS-type microsystems working in vacuum conditions are described. All the benefits and drawbacks of vacuum generated in microcavities are discussed. Different methods are used to produce vacuum in microcavity of MEMS. Some bonding techniques, sacrificial layer method or getter materials are presented. It is concluded that the best solution would be to invent some kind of vacuum micropump integrated with MEMS structure. Few types of already existing vacuum micropumps are shown, but they are not able to generate high vacuum. As the most promising candidate for miniaturization an orbitron pump was selected. The working principle and novel concepts of its construction are described. The most important part of the micropump, used for gas ionization, is a field-emission electron source. Results of a research on a lateral electron source with gold emissive layer for integration with a micropump are presented.
    Źródło:
    Bulletin of the Polish Academy of Sciences. Technical Sciences; 2012, 60, 1; 19-23
    0239-7528
    Pojawia się w:
    Bulletin of the Polish Academy of Sciences. Technical Sciences
    Dostawca treści:
    Biblioteka Nauki
    Artykuł
    Tytuł:
    Inkjet 3D printing – towards new micromachining tool for MEMS fabrication
    Autorzy:
    Walczak, R,
    Powiązania:
    https://bibliotekanauki.pl/articles/200235.pdf
    Data publikacji:
    2018
    Wydawca:
    Polska Akademia Nauk. Czytelnia Czasopism PAN
    Tematy:
    inkjet 3D printing
    MEMS
    micromachining
    lab-on-a-chip
    mikroobróbka
    druk atramentowy
    Opis:
    Three-dimensional (3D) printing has the potential to transform science and technology by creating bespoke, low-cost appliances that previously required dedicated facilities in order to be made. An attractive and promising research field comes in the form of using 3D printing to create MEMS, including microfluidic structures. In this paper, a discussion on applicability of inkjet 3D printing (i3Dp) for MEMS fabrication is presented on the base of works carried out by a team led by the author.
    Źródło:
    Bulletin of the Polish Academy of Sciences. Technical Sciences; 2018, 66, 2; 179-186
    0239-7528
    Pojawia się w:
    Bulletin of the Polish Academy of Sciences. Technical Sciences
    Dostawca treści:
    Biblioteka Nauki
    Artykuł
    Tytuł:
    Squeeze flow modeling with the use of micropolar fluid theory
    Autorzy:
    Kucaba-Piętal, A.
    Powiązania:
    https://bibliotekanauki.pl/articles/202239.pdf
    Data publikacji:
    2017
    Wydawca:
    Polska Akademia Nauk. Czytelnia Czasopism PAN
    Tematy:
    micropolar fluid
    squeeze flow
    MEMS
    tribology
    non-Newtonian fluid
    płyn mikropolarny
    tribologia
    ciecz nienewtonowska
    Opis:
    The aim of this paper is to study the applicability of micropolar fluid theory to modeling and to calculating tribological squeeze flow characteristics depending on the geometrical dimension of the flow field. Based on analytical solutions in the lubrication regime of squeeze flow between parallel plates, calculations of the load capacity and time required to squeeze the film are performed and compared – as a function of the distance between the plates – for both fluid models: the micropolar model and the Newtonian model. In particular, maximum distance between the plates for which the micropolar effects of the fluid become significant will be established. Values of rheological constants of the fluids, both those experimentally determined and predicted by means of using equilibrium molecular dynamics, have been used in the calculations. The same analysis was performed as a function of dimensionless microstructural parameters.
    Źródło:
    Bulletin of the Polish Academy of Sciences. Technical Sciences; 2017, 65, 6; 927-933
    0239-7528
    Pojawia się w:
    Bulletin of the Polish Academy of Sciences. Technical Sciences
    Dostawca treści:
    Biblioteka Nauki
    Artykuł
    Tytuł:
    Electron optics column for a new MEMS-type transmission electron microscope
    Autorzy:
    Krysztof, M.
    Grzebyk, T.
    Górecka-Drzazga, A.
    Adamski, K.
    Dziuban, J.
    Powiązania:
    https://bibliotekanauki.pl/articles/201167.pdf
    Data publikacji:
    2018
    Wydawca:
    Polska Akademia Nauk. Czytelnia Czasopism PAN
    Tematy:
    MEMS
    miniature TEM
    electron emission
    focusing of electron beam
    electron optics column
    emisja elektronów
    ogniskowanie
    wiązka elektronów
    mikrostruktura TEM
    Opis:
    The concept of a miniature transmission electron microscope (TEM) on chip is presented. This idea assumes manufacturing of a silicon-glass multilayer device that contains a miniature electron gun, an electron optics column integrated with a high vacuum micropump, and a sample microchamber with a detector. In this article the field emission cathode, utilizing carbon nanotubes (CNT), and an electron optics column with Einzel lens, made of silicon, are both presented. The elements are assembled with the use of a 3D printed polymer holder and tested in a vacuum chamber. Effective emission and focusing of the electron beam have been achieved. This is the first of many elements of the miniature MEMS (Micro-Electro-Mechanical System) transmission electron microscope that must be tested before the whole working system can be manufactured.
    Źródło:
    Bulletin of the Polish Academy of Sciences. Technical Sciences; 2018, 66, 2; 133-137
    0239-7528
    Pojawia się w:
    Bulletin of the Polish Academy of Sciences. Technical Sciences
    Dostawca treści:
    Biblioteka Nauki
    Artykuł
      Wyświetlanie 1-5 z 5

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