- Tytuł:
- Optimised magnetron sputtering method for the deposition of indium tin oxide layers
- Autorzy:
-
Musztyfaga-Staszuk, Małgorzata
Pudiš, Dušan
Socha, Robert
Gawlińska-Nęcek, Katarzyna
Panek, Piotr - Powiązania:
- https://bibliotekanauki.pl/articles/2090684.pdf
- Data publikacji:
- 2021
- Wydawca:
- Polska Akademia Nauk. Czytelnia Czasopism PAN
- Tematy:
-
In2O3
Sn2O
ITO
magnetron sputtering method
metoda rozpylania magnetronowego - Opis:
- The article presents the method of magnetron sputtering for the deposition of conductive emitter coatings in semiconductor structures. The layers were applied to a silicon substrate. For optical investigations, borosilicate glasses were used. The obtained layers were subjected to both optical and electrical characterisation, as well as structural investigations. The layers on silicon substrates were tested with the four-point probe to find the dependence of resistivity on the layer thickness. The analysis of the elemental composition of the layer was conducted using a scanning electron microscope equipped with an EDS system. The morphology of the layers was examined with the atomic force microscope (AFM) of the scanning electron microscope (SEM) and the structures with the use of X-ray diffraction (XRD). The thickness of the manufactured layers was estimated by ellipsometry. The composition was controlled by selecting the target and the conditions of the application, i.e. the composition of the plasma atmosphere and the power of the magnetrons. Based on the obtained results, this article aims to investigate the influence of the manufacturing method and the selected process parameter on the optical properties of thin films, which should be characterised by the highest possible value of the transmission coefficient (>85–90%) and high electrical conductivity.
- Źródło:
-
Bulletin of the Polish Academy of Sciences. Technical Sciences; 2021, 69, 6; e139005, 1--6
0239-7528 - Pojawia się w:
- Bulletin of the Polish Academy of Sciences. Technical Sciences
- Dostawca treści:
- Biblioteka Nauki
Artykuł