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Wyświetlanie 1-4 z 4
Tytuł:
Characterization of the ionization process inside a miniature glow-discharge micropump
Autorzy:
Grzebyk, T.
Górecka-Drzazga, A.
Powiązania:
https://bibliotekanauki.pl/articles/200204.pdf
Data publikacji:
2018
Wydawca:
Polska Akademia Nauk. Czytelnia Czasopism PAN
Tematy:
ion-sorption micropump
MEMS-type micropump
gas discharge
ionization
mikropompa jonowo-sorpcyjna
mikropompa typu MEMS
wyładowanie gazu
jonizacja
Opis:
The article presents a detailed characterization of the ionization process taking place inside a miniature MEMS-type ion-sorption vacuum pump, based on the Penning pump architecture. Influence of a variety of parameters on the discharge current has been investigated. These include: magnetic field, type of material used for the electrodes as well as horizontal and vertical dimensions of the micropump. It was found that the micropump works efficiently as long as the magnetic field is higher than 0.3 T, and the pumping cell’s dimensions exceed 1x1x1 mm3. Best results have been obtained for copper and aluminum cathodes and low resistivity silicon anodes.
Źródło:
Bulletin of the Polish Academy of Sciences. Technical Sciences; 2018, 66, 2; 173-178
0239-7528
Pojawia się w:
Bulletin of the Polish Academy of Sciences. Technical Sciences
Dostawca treści:
Biblioteka Nauki
Artykuł
Tytuł:
Vacuum microdevices
Autorzy:
Grzebyk, T.
Górecka-Drzazga, A.
Powiązania:
https://bibliotekanauki.pl/articles/201008.pdf
Data publikacji:
2012
Wydawca:
Polska Akademia Nauk. Czytelnia Czasopism PAN
Tematy:
vacuum microsystems
miniature vacuum pump
field-emission electron source
MEMS
Opis:
In the paper MEMS-type microsystems working in vacuum conditions are described. All the benefits and drawbacks of vacuum generated in microcavities are discussed. Different methods are used to produce vacuum in microcavity of MEMS. Some bonding techniques, sacrificial layer method or getter materials are presented. It is concluded that the best solution would be to invent some kind of vacuum micropump integrated with MEMS structure. Few types of already existing vacuum micropumps are shown, but they are not able to generate high vacuum. As the most promising candidate for miniaturization an orbitron pump was selected. The working principle and novel concepts of its construction are described. The most important part of the micropump, used for gas ionization, is a field-emission electron source. Results of a research on a lateral electron source with gold emissive layer for integration with a micropump are presented.
Źródło:
Bulletin of the Polish Academy of Sciences. Technical Sciences; 2012, 60, 1; 19-23
0239-7528
Pojawia się w:
Bulletin of the Polish Academy of Sciences. Technical Sciences
Dostawca treści:
Biblioteka Nauki
Artykuł
Tytuł:
Electron optics column for a new MEMS-type transmission electron microscope
Autorzy:
Krysztof, M.
Grzebyk, T.
Górecka-Drzazga, A.
Adamski, K.
Dziuban, J.
Powiązania:
https://bibliotekanauki.pl/articles/201167.pdf
Data publikacji:
2018
Wydawca:
Polska Akademia Nauk. Czytelnia Czasopism PAN
Tematy:
MEMS
miniature TEM
electron emission
focusing of electron beam
electron optics column
emisja elektronów
ogniskowanie
wiązka elektronów
mikrostruktura TEM
Opis:
The concept of a miniature transmission electron microscope (TEM) on chip is presented. This idea assumes manufacturing of a silicon-glass multilayer device that contains a miniature electron gun, an electron optics column integrated with a high vacuum micropump, and a sample microchamber with a detector. In this article the field emission cathode, utilizing carbon nanotubes (CNT), and an electron optics column with Einzel lens, made of silicon, are both presented. The elements are assembled with the use of a 3D printed polymer holder and tested in a vacuum chamber. Effective emission and focusing of the electron beam have been achieved. This is the first of many elements of the miniature MEMS (Micro-Electro-Mechanical System) transmission electron microscope that must be tested before the whole working system can be manufactured.
Źródło:
Bulletin of the Polish Academy of Sciences. Technical Sciences; 2018, 66, 2; 133-137
0239-7528
Pojawia się w:
Bulletin of the Polish Academy of Sciences. Technical Sciences
Dostawca treści:
Biblioteka Nauki
Artykuł
Tytuł:
Field-emission light sources for lab-on-a-chip microdevices
Autorzy:
Górecka-Drzazga, A.
Cichy, B.
Szczepańska, P.
Walczak, R.
Dziuban, J.
Powiązania:
https://bibliotekanauki.pl/articles/201010.pdf
Data publikacji:
2012
Wydawca:
Polska Akademia Nauk. Czytelnia Czasopism PAN
Tematy:
lab-on-a-chip
field emission
light source
microcytometer
Opis:
Microfluidic devices called lab-on-a-chips utilize two kinds of characterization of a biosample, which are based on spectrofluorimetric and spectrophotometric methodologies. Lab-on-a-chips are equipped with an optical instrumentation and a software system that allow detecting of the optical signals and their processing into spectral characteristics. In the paper, technology of lab-on-a-chip (cytometer microdevice) and miniature silicon-glass field-emission light source (FELS) is described. Electrons emitted from a silicon cathode covered with carbon nanotubes excite light emission from nanocrystalline rare earth doped yttrium oxide phosphor (anode). The emitted light can be precisely tailored to the main absorption line of a fluorescent marker. The presented system has been successfully used for testing of the cow embryos as well as fluorescent-marked porcine oocytes.
Źródło:
Bulletin of the Polish Academy of Sciences. Technical Sciences; 2012, 60, 1; 13-17
0239-7528
Pojawia się w:
Bulletin of the Polish Academy of Sciences. Technical Sciences
Dostawca treści:
Biblioteka Nauki
Artykuł
    Wyświetlanie 1-4 z 4

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