- Tytuł:
- Numerical Analysis of Metal-Cylinder-Based Microwave Plasma Module
- Autorzy:
-
Sobański, M.
Jasiński, M.
Mizeraczyk, J. - Powiązania:
- https://bibliotekanauki.pl/articles/1366115.pdf
- Data publikacji:
- 2014-06
- Wydawca:
- Polska Akademia Nauk. Instytut Fizyki PAN
- Tematy:
-
88.80.hp
84.40.-x
52.35.Hr
84.40.Dc
02.70.Dh
88.30.E-
52.65.-y
52.50.Dg
11.55.-m
52.40.Fd
84.40.Az - Opis:
- We present optimization of energy transfer in the waveguide-supplied metal-cylinder-based microwave plasma module with an inner cylindrical quartz tube. The construction of microwave plasma module is based on a WR 340 waveguide standard. Presented microwave plasma module operates at atmospheric pressure and frequency of 2.45 GHz. There is a reduced height section waveguide in microwave plasma module which provides local increase of the electric field in the plasma region. Microwave plasma module is terminated with a movable plunger which plays the role of the tuning element. Tuning characteristics of microwave plasma module are defined as the dependence of the $P_{R}$/$P_{I}$ on the position $l_{s}$ of the movable plunger, where $P_{R}$ and $P_{I}$ are the microwave power reflected and power incident, respectively. The powers $P_{R}$ and $P_{I}$ are measured in the input plane of microwave plasma module. The purpose of the presented optimization is to achieve $P_{R}$ lower than 5% of $P_{I}$ in widest range of position of movable plunger $l_{s}$. We used Comsol Multiphysics software to make numerical analysis which allows to optimize the parameters of microwave plasma module. Results of numerical analysis show that $P_{R}$/$P_{I}$ is lower than 0.05 in a wide range of movable plunger position $l_{s}$.
- Źródło:
-
Acta Physica Polonica A; 2014, 125, 6; 1309-1311
0587-4246
1898-794X - Pojawia się w:
- Acta Physica Polonica A
- Dostawca treści:
- Biblioteka Nauki
Artykuł