Semi-automatic test system for characterization of ASIC/MPWS

A measurement system for integrated circuit testing has been developed. It consists of a semi-automatic probe station and a set of measurement equipment controlled by commercially available measurement software. The probe station is controlled by dedicated software. Both the measurement and station-control software communicate using the DDE protocol. The measurement system is flexible. It is particularly suitable for semi-automatic testing of multi-project wafers. Output data generated by the system is used for the characterization of the CMOS technologies.