Contactless method for resistance measurement of ultra-thin printed and conductive lines

In this paper the problem of resistance measurement of ultrathin conductive lines on dielectric substrates dedicated for printing electronic industry is discussed. The measured line is transformed in a non-invasive way into a resonance circuit. By using a magnetic coupling between the source line and the tested line, the resistance measurement can be performed non-invasively, i.e. without a mechanical contact. The proposed contactless resistance measurement method is based on the resonance quality factor estimation and it is an example of the inverse problem in metrology.