Direct Ellipsometry Problem for the Substrate-Based Uniaxial Non-Homogeneous Film

An iterative procedure of calculation of reflectivities and transmission coefficients of light rays for an uniaxial film with a lapse rate of an index of refraction on a uniaxial substrate was gained by orienting the axis of anisotropy along the normal to the boundary. With its help the dependences of ellipsometric angles Δ and ψ for a linear, quadratic, and sine-shaped profiles of refractive indices of a uniaxial immersing film with optic axis oriented along the normal to the boundary were analyzed. The dependences of angles Δ andψ on quantity of an uptake and anisotropy of the film were also examined. The numerical modelling for ZnO films and Langmuir-Blodgett-like films on a melted quartz was carried out, and this allowed to draw conclusions of practical importance for the ellipsometric investigations of the film structures.