Some Problems in Quantitative Auger Analysis of Metallic Alloys

Factors determining the Auger signal intensity are discussed. It is indicated that using standards is the only reasonable way for quantitative Auger analysis (QAA). Approaches to QAA without and with matrix corrections are presented. It is shown that the matrix correction connected with atomic concentrations of pure standards is the most important and that the other matrix corrections (e.g. those connected with the attenuation length and backscattering factor) do not improve appreciably the QAA exactness in many examples taken from the literature. The examples indicate that in the case of metallic alloys the properly performed QAA gives the relative atomic concentrations with the error not exceeding few percent.