Binary-phase metal-based sandwiched grating with high efficiency

We describe a novel high efficiency element based on a binary-phase metal-based sandwiched grating, where the binary grating is covered by a dielectric layer and connected by a metal slab on the fused-silica substrate. The modal method is used to optimize the grating duty cycle and period to analyze the feasibility to achieve high efficiency for TE and TM polarizations by effective indices of the modes excited in the grating region. Rigorous coupled-wave analysis (RCWA) is employed to optimize the grating depth and to cover the layer thickness accurately by numerical calculations. It is not easy for the conventional binary grating with a usual duty cycle to achieve high efficiency in the –1st order for TM polarization. For the binary-phase metal-based sandwiched grating, high efficiency can be diffracted into the –1st order for not only TE polarization but also TM polarization. Moreover, the wide fabrication tolerance, the wideband property and the flat surface of easy cleaning should be significant for practical applications in a variety of optical systems.