Electrochemical Formation and Microstructure of Porous Gallium Phosphide

Electrochemical formation and microstructure of porous GaP have been investigated. Nanostructured porous GaP layers of thickness up to ≈ 20 μm were fabricated on n-type (111)-oriented crystalline c-GaP substrates. Studies of microstructure of porous GaP in dependence on electrolyte type and regimes of technological procedure have been carried out by scanning electron microscopy. The samples were characterized by spectroscopic ellipsometry in visible and near UV spectral range. The investigations have shown that the structure and optical response of porous GaP can be efficiently controlled by technological procedure of electrochemical formation. The shape and dimension of pores can be varied from nanometer-scaled cylindrical pores to GaP nanorods.