Effects of Fluences of Irradiation with 107 MeV Krypton Ions on the Recovery Charge of Silicon $p^{+}n$-Diodes

The diodes manufactured on the wafers of single-crystalline silicon uniformly doped with phosphorus are studied. The wafer resistivity was 90 Ω cm. Krypton ions are implanted to the side of the $p^{+}$-region of diodes (energy 107 MeV, fluence Φp from 5 × $10^7$ to 4 × $10^9 cm^{-2}$). It is shown that recovery charge $Q_{rr}$ is inversely proportional to the square root of the irradiation fluence value Φp. When the fluence increases, the part of the recovery charge Q_{rrA}, due to the high reverse conductance phase, decreases faster than the value $Q_{rr}$.