Electron Beam Induced Modification of Polymer-Like Carbon Coatings

Carbon coatings can possess diamond-like, polymer-like, graphite-like or other properties depending on deposition methods and technological parameters. Structural changes in the polymer-like carbon coatings irradiated by high energy electrons are discussed in the present paper. The polymer-like carbon coatings have been synthesized from $C_2H_2$ gas in the radio frequency dual-plasma reactor using various deposition parameters. Plasma enhancement chemical vapor deposition deposited experimental polymer-like carbon samples were irradiated with high energy electrons in the medical linear accelerator. The investigations of carbon coatings have been carried out using the Fourier-transform infrared, Raman and UV-VIS spectroscopies. Modification of the polymer-like carbon coatings is discussed in relation with radiation induced formation of free radicals and unsaturated bonds along with possible cross-linking processes.