Influence of Deposition Parameters and Thermal Annealing on the Structure and Properties of Nitride Coatings (TiHfZrVNb)N

Results of structure, phase composition, physical and mechanical properties and tribological properties investigations of nitride high-entropy coatings (TiZrHfVNb)N are presented in the paper. Proton microbeam (μ-PIXE), X-ray diffraction method, including method of X-ray strains measurements, energy dispersive X-ray spectroscopy and scanning electron microscopy analysis, microhardness testing and nanoindentation were used. Thermal annealing (t=600°C) influence on defect profiles, structure and element distribution in the coatings was investigated. It was found that thermal treatment of coatings leads to changing of defect profiles and to element redistribution. Also we can say that it influences less on grain size changing. Investigated (TiZrHfVNb)N coatings demonstrate high values of hardness and excellent wear resistance.