Influence of Substrate Temperature on Magnetic and Structural Properties of RF Magnetron Sputtered Co-Cr Thin Films

The present paper describes the substrate temperature T$\text{}_{s}$ dependence on magnetic and structural properties of Co-21 at.% Cr thin films deposited on the Corning glass substrate by RF magnetron sputtering. The properties of the samples, such as saturation magnetization M$\text{}_{s}$, in-plane squareness ratio S$\text{}_{∥}$, effective magnetic anisotropy field H'$\text{}_{k}$, spectroscopic splitting factor g, and hcp (002) peak intensity I$\text{}_{002}$, were examined by vibrating sample magnetometer, Q-band (≈ 33.9 GHz) ferromagnetic resonance measurements and X-ray diffractometry. Specially, the presence of the various ferromagnetic constituents in Co-Cr thin films are examined by the ferromagnetic resonance studies. With increasing T$\text{}_{s}$ from room temperature to 200°C, S$\text{}_{∥}$ increases from 0.08 to 0.56 but H'$\text{}_{k}$ decreases from 2530 Oe to -3900 Oe. Also I$\text{}_{002}$ decreases with increasing T$\text{}_{s}$. It is summarized that the perpendicular magnetic anisotropy and c-axis orientation of Co-Cr films are improved at lower substrate temperature.